Abaqus - A microfabricated device dynamic analysis -SSU

Hi, 

I'm trying to run a linear dynamic analysis on a microfabricated device - some of the model feature dimensions are in nano scale and the frequency range is from Hz - KHz/Mhz , the results precision has to be in nm.

Is this something that's feasible to do in SSU? or in FEA in general.
See image for clarification

Thanks,

Michael

Abaqus ​​​​​​​